TY  - RPRT
TI  - Shape-sensitive linewidth measurements of resist structures: LITG410I project
AU  - Villarrubia, John S
AU  - Vladár, András
AU  - Postek, Michale T
PY  - 2004
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7089
DO  - 10.6028/NIST.IR.7089
ER  -