TY  - RPRT
TI  - NanometrologyPrograms and accomplishments : FY 2003 program and selected accomplishments
AU  - Allocca, Clare
AU  - Freiman, Stephen
PY  - 2004
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7074
DO  - 10.6028/NIST.IR.7074
ER  -