TY  - RPRT
TI  - Workshop summary report : scanning probe nanolithography workshop
AU  - Dagata, John A
AU  - Yokoyama, Hiroshi
AU  - Perez-Murano, Francesc
PY  - 2003
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 7040
DO  - 10.6028/NIST.IR.7040
ER  -