TY  - RPRT
TI  - Silicon microelectronics programs at the National Institute of Standards and Technology: programs, activities, and accomplishments
AU  - Pinillos, Stephen Knight;Joaquin V Martinez de
AU  - Buckley, Michele
PY  - 2002
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 6884
DO  - 10.6028/NIST.IR.6884
ER  -