TY  - RPRT
TI  - MEMS length and strain measurements using an optical interferometer 
AU  - Marshall, J C
PY  - 2001
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 6779
DO  - 10.6028/NIST.IR.6779
ER  -