TY  - RPRT
TI  - Silicon microelectronics programs at the National Institute of Standards and Technology: programs, activities, and accomplishments
AU  - Knight, Stephen
AU  - Pinillos, Joaquin V Martinez de
AU  - Belzer, Barbara J
AU  - Buckley, Michele
PY  - 2001
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 6731
DO  - 10.6028/NIST.IR.6731
ER  -