TY  - RPRT
TI  - Workshop on temperature measurement of semiconductor wafers using thermocouples 
AU  - Kreider, K G
AU  - DeWitt, D P
AU  - Tsai, B K
AU  - Lojek, B
PY  - 2001
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 6566
DO  - 10.6028/NIST.IR.6566
ER  -