TY  - RPRT
TI  - Evaluation of dielectric properties of polymer thin-film materials for application in embedded capacitance 
AU  - Obrzut, Jan
AU  - Chiang, C K
AU  - Popielarz, R
AU  - Nozaki, R
PY  - 2000
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 6537
DO  - 10.6028/NIST.IR.6537
ER  -