TY  - RPRT
TI  - SEM Sentinel: SEM performance measurement system, part 1
AU  - Ling, Alice V
AU  - Vládar, András
AU  - Damazo, Bradley N
AU  - Donmez, M Alkan
AU  - Postek, Michael T
PY  - 2000
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 6498
DO  - 10.6028/NIST.IR.6498
ER  -