TY  - RPRT
TI  - Optical metrology for industrialization of optical information processing 
AU  - Casasent, David
AU  - Wilson, C L
PY  - 1997
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 6060
DO  - 10.6028/NIST.IR.6060
ER  -