TY  - RPRT
TI  - Mechanical properties of aluminum nitride substrates 
AU  - Wallace, J S
AU  - Fuller, E R Jr
AU  - Freiman, S W
PY  - 1996
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 5903
DO  - 10.6028/NIST.IR.5903
ER  -