TY  - RPRT
TI  - National Semiconductor Metrology Program: project portfolio, FY 1996
AU  - Yaney, David S
AU  - Settle-Raskin, Alice D
PY  - 1996
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 5851
DO  - 10.6028/NIST.IR.5851
ER  -