TY - RPRT TI - Workshop on characterizing diamond films IV, March 4-5, 1996, Gaithersburg, MD AU - Feldman, Albert AU - Malshe, Ajay P AU - Graebner, John E PY - 1996 PB - National Institute of Standards and Technology CY - Gaithersburg, MD SN - NIST IR 5837 DO - 10.6028/NIST.IR.5837 ER -