TY - RPRT TI - Summary report: second workshop on industrial applications of scanned probe microscopy, May 2-3, 1995 AU - Dagata, J A AU - Diebold, A C AU - Shih, C K AU - Colton, R J PY - 1995 PB - National Institute of Standards and Technology CY - Gaithersburg, MD SN - NIST IR 5752 DO - 10.6028/NIST.IR.5752 ER -