TY  - RPRT
TI  - Metrology and data for microelectronic packaging and interconnection: results of a joint workshop on materials metrology and data for commercial electrical and optical packaging and interconnection technologies, May 5-6, 1994, Gaithersburg, MD
PY  - 1994
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 5520v2
DO  - 10.6028/NIST.IR.5520v2
ER  -