TY - RPRT TI - Metrology and data for microelectronic packaging and interconnection: results of a joint workshop on materials metrology and data for commercial electrical and optical packaging and interconnection technologies, May 5-6, 1994, Gaithersburg, MD PY - 1994 PB - National Institute of Standards and Technology CY - Gaithersburg, MD SN - NIST IR 5520v1 DO - 10.6028/NIST.IR.5520v1 ER -