TY - RPRT TI - Workshop on characterizing diamond films III: February 23-24, 1994, Gaithersburg, MD AU - Klein, Claude A AU - Lu, Grant PY - 1994 PB - National Institute of Standards and Technology CY - Gaithersburg, MD SN - NIST IR 5418 DO - 10.6028/NIST.IR.5418 ER -