TY  - RPRT
TI  - Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service 
AU  - Zaghloul, M
AU  - Novotny, D
AU  - Tyree, V
AU  - Pi, J -I
AU  - Pi��, C
AU  - Hansford, W
PY  - 1994
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 5402
DO  - 10.6028/NIST.IR.5402
ER  -