TY  - RPRT
TI  - RLNIST Workshop on Moisture Measurement and Control for Microelectronics: proceedings of the RLNIST Workshop, held at the National Institute of Standards and Technology, Gaithersburg, MD, April 5-7, 1996
PY  - 1993
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 5241
DO  - 10.6028/NIST.IR.5241
ER  -