TY  - RPRT
TI  - MAESTRO: a front-end to the MAIN1 program for multiple-angle measurement of silicon dioxide layers
PY  - 1992
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 4969
DO  - 10.6028/NIST.IR.4969
ER  -