TY  - RPRT
TI  - Metrologic Support for the DARPANRL-XRL Mask Program: ellipsometric analyses of SiC thin films on Si
AU  - Chandler-Horowitz, D
AU  - Nguyen, N V
AU  - Marchiando, J F
AU  - Amirtharaj, P M
PY  - 1993
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 4860
DO  - 10.6028/NIST.IR.4860
ER  -