TY  - RPRT
TI  - Methodology for the computer-aided design of silicon micromachined devices in a standard CMOS process 
AU  - Marshall, Janet C
AU  - Parameswaran, M
AU  - Zaghloul, Mona E
AU  - Gaitan, Michael
PY  - 1992
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NIST IR 4845
DO  - 10.6028/NIST.IR.4845
ER  -