TY  - RPRT
TI  - Building a Metrology Exchange to Innovate in Semiconductors (METIS) A Vision for the CHIPS Metrology Program Data Exchange
PY  - 2023
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - error: NIST CHIPS 1000-2 ipd
DO  - 10.6028/NIST.CHIPS.1000-2.ipd
ER  -