TY  - RPRT
TI  - Methods of measurement for semiconductor materials, process control, and devices quarterly report : October 1 to December 30, 1971
AU  - Bullis, W Murray
PY  - 1972
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS TN 727
DO  - 10.6028/NBS.TN.727
ER  -