TY  - RPRT
TI  - Application of capacitor microphones and magnetic pickups to the tuning and trouble shooting of microelectronic ultrasonic bonding equipment 
AU  - Harman, George G
PY  - 1971
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS TN 573
DO  - 10.6028/NBS.TN.573
ER  -