TY  - RPRT
TI  - Measurement methods for the semiconductor device industry : a summary of NBS activity
AU  - Bullis, W Murray
PY  - 1969
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS TN 511
DO  - 10.6028/NBS.TN.511
ER  -