TY  - RPRT
TI  - Measurement assurance for dimensional measurements on integrated-circuit photomasks 
AU  - Croarkin, Carroll
PY  - 1982
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS TN 1164
DO  - 10.6028/NBS.TN.1164
ER  -