TY  - RPRT
TI  - NIST recommended practice guide pre characterization in low-k dielectric films using x-ray reflectivitiy
AU  - Lee, Hae-Jeong
AU  - Wu, Wen-li
AU  - Soles, Christopher L
PY  - 2004
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NBS SP 960-13
DO  - 10.6028/NBS.SP.960-13
ER  -