TY  - RPRT
TI  - Standard Reference Materials Preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon
AU  - Belzer, B J
AU  - Chandler-Horowitz, D
AU  - Novotny, D B
AU  - Candela, G A
AU  - Croarkin, M C
PY  - 1988
PB  - National Institute of Standards and Technology
CY  - Gaithersburg, MD
SN  - NBS SP 260-109
DO  - 10.6028/NBS.SP.260-109
ER  -