TY  - RPRT
TI  - Computer software for the computation of the scattered field and the optical microscope image of line objects patterned in thick layers 
AU  - Nyyssonen, D
PY  - 1987
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 87-3618
DO  - 10.6028/NBS.IR.87-3618
ER  -