TY  - RPRT
TI  - RADCNBS international workshop moisture measurement and control for microelectronics (IV) : proceedings of the RADCNBS workshop held at the National Bureau of Standards Gaithersburg, MD November 12-14, 1986
AU  - Kane, Didier
AU  - Moore, Benjamin A
AU  - Walters, W Janes
PY  - 1987
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 87-3588
DO  - 10.6028/NBS.IR.87-3588
ER  -