TY  - RPRT
TI  - Double-level metallization : annual report for October 1, 1985 to September 30, 1986
AU  - Carver, G P
AU  - Novotny, D B
AU  - Hershey, R
AU  - Luther, J E
PY  - 1987
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 87-3579
DO  - 10.6028/NBS.IR.87-3579
ER  -