TY  - RPRT
TI  - Linewidth calibration for bright-chromium photomasks 
AU  - Nyyssonen, D
PY  - 1986
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 86-3357
DO  - 10.6028/NBS.IR.86-3357
ER  -