TY  - RPRT
TI  - Ultraclean semiconductor processing laboratory safe operating procedures manual 
AU  - Carver, G P
PY  - 1985
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 85-3149
DO  - 10.6028/NBS.IR.85-3149
ER  -