TY  - RPRT
TI  - Analysis of oxide and oxidematrix interfaces in silicon nitride 
AU  - Tighe, Nancy J
PY  - 1982
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 82-2574
DO  - 10.6028/NBS.IR.82-2574
ER  -