TY  - RPRT
TI  - Evaluation of a CMOSSOS process using process validation wafers 
AU  - Suehle, S E
AU  - Linholm, L W
AU  - Marshall, G M
PY  - 1982
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 82-2514
DO  - 10.6028/NBS.IR.82-2514
ER  -