TY  - RPRT
TI  - A computer program for analysis of data from microelectronic test structures 
AU  - Mattis, R L
AU  - Till, L J
AU  - Frisch, R C
PY  - 1982
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 82-2492
DO  - 10.6028/NBS.IR.82-2492
ER  -