TY  - RPRT
TI  - Benefits and costs of improved measurements : the case of integrated-circuit photomask linewidths
AU  - Rawie, Carol Chapman
PY  - 1982
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 82-2458
DO  - 10.6028/NBS.IR.82-2458
ER  -