TY  - RPRT
TI  - Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density 
AU  - Russell, T J
PY  - 1982
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 81-2413
DO  - 10.6028/NBS.IR.81-2413
ER  -