TY  - RPRT
TI  - Investigation of the two-dimensional shape of ion-implanted regions 
AU  - Roitman, P
AU  - Albers, J
AU  - Ehrstein, J R
AU  - Myers, D R
PY  - 1981
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 81-2398
DO  - 10.6028/NBS.IR.81-2398
ER  -