TY  - RPRT
TI  - Semiconductor technology program : progress briefs
AU  - Galloway, K F
AU  - Scace, R J
AU  - Walters, E J
PY  - 1981
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 81-2230-3
DO  - 10.6028/NBS.IR.81-2230-3
ER  -