TY  - RPRT
TI  - Some considerations regarding film thickness standards for the semiconductor industry 
AU  - Ehrstein, James R
PY  - 1980
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 80-2158
DO  - 10.6028/NBS.IR.80-2158
ER  -