TY  - RPRT
TI  - In Situ oxidation of Y?O?-doped Si?N? 
AU  - Tighe, N J
AU  - Kuroda, K
AU  - Mitchell, T E
AU  - Heuer, A H
PY  - 1980
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 80-2075
DO  - 10.6028/NBS.IR.80-2075
ER  -