TY  - RPRT
TI  - The NBS semiconductor technology program and VLSI 
AU  - Bullis, W Murray
AU  - Scace, R I
PY  - 1980
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 80-2057
DO  - 10.6028/NBS.IR.80-2057
ER  -