TY  - RPRT
TI  - Detection of phosphorus in epitaxial silicon by EPR 
AU  - Chang, Te-Tse
PY  - 1979
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 79-1748
DO  - 10.6028/NBS.IR.79-1748
ER  -