TY  - RPRT
TI  - Semiconductor technology program : progress briefs
AU  - Bullis, W Murray
PY  - 1979
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 79-1591-2
DO  - 10.6028/NBS.IR.79-1591-2
ER  -