TY  - RPRT
TI  - Loose-particle detection in microelectronic devices 
AU  - Hilten, John S
AU  - Lederer, Paul S
AU  - Mayo-Wells, J Franklin
AU  - Vezzetti, Carol F
PY  - 1979
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 78-1590
DO  - 10.6028/NBS.IR.78-1590
ER  -