TY  - RPRT
TI  - Development of hydrogen and hydroxyl contamination in thin silicon dioxide thermal films 
AU  - Mayo, Santos
AU  - Evans, William H
PY  - 1979
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 78-1558
DO  - 10.6028/NBS.IR.78-1558
ER  -