TY  - RPRT
TI  - Semiconductor technology program : progress briefs
AU  - Bullis, W Murray
PY  - 1978
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 78-1444-3
DO  - 10.6028/NBS.IR.78-1444-3
ER  -