TY  - RPRT
TI  - Control of mobile-ion contamination in oxidation ambients for MOS device processing 
AU  - Mayo, Santos
AU  - Koyama, Richard Y
AU  - Leedy, Thomas F
PY  - 1978
PB  - National Bureau of Standards
CY  - Gaithersburg, MD
SN  - NBS IR 77-1404
DO  - 10.6028/NBS.IR.77-1404
ER  -